Introduction to Microfabrication
This book will provide coverage of all aspects of the attempt to build functional devices at a molecular size. Emphasis is placed upon general principles and technologies. Franssila provides coverage of specific devices, beginning with simple solar cells and nanowires and building up to more complex examples such as power devices, MEMS, thin film transistors, CMOS and bipolar transistors, to illustrate his points. Materials, processes and the economics of microfabrication are discussed and...
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This accessible text is now fully revised and updated, providing an overview of fabrication technologies and materials needed to realize modern microdevices. It demonstrates how common microfabrication principles can be applied in different applications, to create devices ranging from nanometer probe tips to meter scale solar cells, and a host of microelectronic, mechanical, optical and fluidic devices in between. Latest developments in wafer engineering, patterning, thin films, surface preparation and bonding are covered. This second edition includes:expanded sections on MEMS and microfluidics related fabrication issuesnew chapters on polymer and glass microprocessing, as well as serial processing techniques200 completely new and 200 modified figuresmore coverage of imprinting techniques, process integration and economics of microfabrication300 homework exercises including conceptual thinking assignments, order of magnitude estimates, standard calculations, and device design and process analysis problemssolutions to homework problems on the complementary website, as well as PDF slides of the figures and tables within the book With clear sections separating basic principles from more advanced material, this is a valuable textbook for senior undergraduate and beginning graduate students wanting to understand the fundamentals of microfabrication. The book also serves as a handy desk reference for practicing electrical engineers, materials scientists, chemists and physicists alike.www.wiley.com/go/Franssila_Micro2e
Pt. IIntroduction11Introduction32Micrometrology and materials characterization173Simulation of microfabrication processes27Pt. IIMaterials334Silicon355Thin film materials and processes476Epitaxy657Thin-film growth and structure73Pt. IIIBasic Processes918Pattern generation939Optical lithography9910Lithographic patterns10711Etching11912Wafer cleaning and surface preparation13313Thermal oxidation14314Diffusion15315Ion implantation15916CMP : Chemical-mechanical polishing16517Bonding and layer transfer17318Molding and stamping183Pt. IVStructures19119Self-aligned structures19320Plasma etched structures19921Wet-etched silicon structures20522Sacrificial and released structures21723Structures by deposition227Pt. VIntegration23524Process integration23725CMOS transistor fabrication25526Bipolar technology26927Multilevel metallization27728MEMS process integration28729Processing on non-silicon substrates301Pt. VITools30730Tools for microfabrication30931Tools for hot processes31532Vacuum and plasmas32133Tools for CVD and epitaxy32934Integrated processing337Pt. VIIManufacturing34135Cleanrooms34336Yield34937Wafer fab355Pt. VIIIFuture36138Moore's law36339Microfabrication at large373
