Metal Based Thin Films for Electronics
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This up-to-date handbook covers the main topics of preparation, characterization and properties of complex metal-based layer systems. The authors—an outstanding group of researchers—discuss advanced methods for structure, chemical and electronic state characterization with reference to the properties of thin functional layers, such as metallization and barrier layers for microelectronics, magnetoresistive layers for GMR and TMR, sensor and resistance layers. As such, the book addresses materials specialists in industry, especially in microelectronics, as well as scientists, and can also be recommended for advanced studies in materials science, analytics, surface and solid state science.
1Introduction12Thin film systems : basic aspects7Interconnects for microelectronics7Metallization structures in acoutoelectronics28Silicide layers for electronics48Complex layered systems for magnetoelectronics71Multilayer and single-surface reflectors for X-ray optics103Metallic layers for photovoltaics1223Thin film preparation and characterization techniques141Thin film preparation methods141Electron microscopy and diffraction160X-ray scattering techniques179Spectroscopic techniques197Stress measurement techniques2144Challenges for thin film systems characterization and optimization231Electromigration in metallization layers231Barrier and nucleation layers for interconnects248Acoustomigration in surface acoustic waves structures261Thermal stability of magnetoresistive layer stacks283Functional magnetic layers for sensors and MRAMs295Multilayers for X-ray optical purposes309Functional electric layers3235Devices349Device related aspects for Si-based electronics349SAW high frequency filters, resonators and delay lines353Sensor devices362X-ray optical systems373Thermoelectric sensors and transducers3836Outlook399
