Vacuum Mechatronics
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PrefacexiChapter 1Introduction to Vacuum Mechatronics1Chapter 2Vacuum Environment and Applications112.1Vacuum Fundamentals112.2Artificial Vacuum122.3Natural Vacuum202.4Vacuum: Advantages and Disadvantages212.5Applications22ReprintsThe National Bureau of Standards Primary High-vacuum Standard25How to Select High Vacuum Pumps33Aluminum Alloy Ultrahigh Vacuum System for Molecular Beam Epitaxy43Advances in Vacuum Contamination Control for Electronic Materials Processing49Particle Control for Semiconductor Processing in Vacuum Systems55Mechanisms of Contaminant Particle Production, Migration and Adhesion63Control of Particulate Emissions from Plasma-Etching Systems69Vacuum Systems for Microelectronics75Manufacturing in a Vacuum Environment81Chapter 3Vacuum Mechatronics Fundamentals873.1Materials873.2Lubrication963.3Energy Transfer105ReprintsSpace Environment and Vacuum Properties of Spacecraft Materials111Materials for Ultrahigh Vacuum119Analysis of Outgassing Characteristics of Metals135Lubricating of Mechanisms for Vacuum Service139Considerations of the Lubrication of Spacecraft Mechanisms145Contact Heat Transfer-The Last Decade165Chapter 4Vacuum Mechatronics Components1794.1Actuators1794.2Sensors1854.3Energy Transmission1894.4Machine Elements1934.5Magnetic Levitation196ReprintsUltrahigh Vacuum Line Components203Ultrahigh Vacuum Leak Sealing with a Silicon Resin Product215A Simple Ultrahigh Vacuum Shape Memory Effect Shutter Mechanism217Robotic Joint Experiments Under Ultravacuum219Chapter 5Vacuum Mechatronics Control2375.1Introduction2375.2Basic Issues2395.3Selected Papers242ReprintsApproach to the Dynamically Reconfigurable Robotic Systems245The Central Nervous System as a Low and High Level Control System263Logical Sensor Systems281Chapter 6Vacuum Mechatronic Systems and Applications3076.1System Components3076.2Applications for Microelectronics3106.3Applications for Space3116.4Other Applications3126.5The Future of Vacuum Mechatronics313ReprintsCanadarm and the Space Shuttle315Six Mechanisms Used on the SSM/I Radiometer323UHV Technique for Intervacuum Sample Transfer339Versatile UHV Sample Transfer System347Piezodriven Spindle for a Specimen Holder in the Vacuum Chamber of a Scanning Electron Microscope351Precision Table for Ultrahigh Vacuum Made of Aluminum Alloys355Extended Travel Ultrahigh Vacuum Sample Manipulator with two Orthogonal, Independent Rotations359Appendix AVacuum Mechatronic Components and Companies363Appendix BUnit Conversion Factors365Appendix CFirst International Vacuum Mechatronics Workshop367Reprint Acknowledgements369Index373
