Dusty Plasmas: Physics, Chemistry, and Technological Impacts in Plasma Processing

Hardcover
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Author: Andre Bouchoule

ISBN-10: 0471973866

ISBN-13: 9780471973867

Category: Electronics - Microelectronics

Dusty Plasmas Physics, Chemistry and Technological Impacts in Plasma Processing Edited by André Bouchoule Université d'Orléans, France Dusty Plasmas gives the reader a thorough overview of current knowledge on many aspects of the subject, from the basic science to technological implications. The basic physics and chemistry of dusty plasmas developed in the first two chapters are complemented by the more practical considerations of diagnostics and technological implications in the two final...

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Dusty Plasmas Physics, Chemistry and Technological Impacts in Plasma Processing Edited by Andr? Bouchoule Universit? d'Orl?ans, France Dusty Plasmas gives the reader a thorough overview of current knowledge on many aspects of the subject, from the basic science to technological implications. The basic physics and chemistry of dusty plasmas developed in the first two chapters are complemented by the more practical considerations of diagnostics and technological implications in the two final chapters. The book will be of interest to those already involved in or just discovering dusty plasmas in their research and/or industrial activity.* Physics and Modelling of Dusty Plasmas* Sources and Growth of Particles* Diagnostics of a Dusty Plasma* Technological Impacts of Dusty Plasmas

Physics and Modelling of Dusty Plasmas (J.-P. Boeuf C. Punset).Sources and Growth of Particles (J. Perrin).Diagnostics of a Dusty Plasma (L. Boufendi, et al. ).Technological Impacts of Dusty Plasmas (A. Bouchoule.)Indexes.