Fundamentals of Microfabrication: The Science of Miniaturization
MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate the increasingly miniature devices that are literally changing our world.\ A bestseller in its first edition, Fundamentals of Microfabrication, Second Edition reflects the many developments in...
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MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate the increasingly miniature devices that are literally changing our world.A bestseller in its first edition, Fundamentals of Microfabrication, Second Edition reflects the many developments in methods, materials, and applications that have emerged recently. Renowned author Marc Madou has added exercise sets to each chapter, thus answering the need for a textbook in this field.Fundamentals of Microfabrication, Second Edition offers unique, in-depth coverage of the science of miniaturization, its methods, and materials. From the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering, it provides the background, tools, and directions you need to confidently choose fabrication methods and materials for a particular miniaturization problem.New in the Second EditionRevised chapters that reflect the many recent advances in the fieldUpdated and enhanced discussions of topics including DNA arrays, microfluidics, micromolding techniques, and nanotechnology In-depth coverage of bio-MEMs, RF-MEMs, high-temperature, and optical MEMs.Many more links to the WebProblem sets in each chapter Booknews This textbook offers a comprehensive introduction to the science of miniaturization, reviewing both the top-down and bottom-up manufacturing methods and bridging the gap between wet and dry micro- engineering. The book covers the science, methods, and materials of miniaturization, and provides guidance on choosing fabrication methods and materials for a particular problem. Recent developments are emphasized. Numerous illustrations support the text. A glossary is included. Annotation c. Book News, Inc., Portland, OR (booknews.com)
Ch. 1Lithography1Ch. 2Pattern Transfer with Dry Etching Techniques77Ch. 3Pattern Transfer with Additive Techniques123Ch. 4Wet Bulk Micromachining183Ch. 5Surface Micromachining259Ch. 6LIGA and Micromolding325Ch. 7A Comparison of Miniaturization Techniques: Top-Down and Bottom-Up Manufacturing379Ch. 8Modeling, Brains, Packaging, Sample Preparation, and Substrate Choice467Ch. 9Scaling, Actuators, and Power in Miniaturized Systems535Ch. 10Miniaturization Applications615App. AMetrology Techniques for MEMS669App. BLiving Book671App. CSi and SiO[subscript 2] Etch Rates in KOH673App. DGenetics675App. E: Suggested Further Reading679App. FMEMS Companies685App. G: Glossary687Index703
\ From The CriticsThis textbook offers a comprehensive introduction to the science of miniaturization, reviewing both the top-down and bottom-up manufacturing methods and bridging the gap between wet and dry micro- engineering. The book covers the science, methods, and materials of miniaturization, and provides guidance on choosing fabrication methods and materials for a particular problem. Recent developments are emphasized. Numerous illustrations support the text. A glossary is included. Annotation c. Book News, Inc., Portland, OR (booknews.com)\ \
