Handbook Of Sputter Deposition Technology
A concise, comprehensive overview of sputter deposition technology—a key technology for materials research in the next decade.\ Cathode sputtering is widely used in the microelectronics industry for silicon integrated circuit production and for metallurgical coatings. High temperature superconductors can be synthesized with sputtering under non-equilibrium conditions. Diamond films and ferroelectric materials are other applications.
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A concise, comprehensive overview of sputter deposition technologyùa key technology for materials research in the next decade. Cathode sputtering is widely used in the microelectronics industry for silicon integrated circuit production and for metallurgical coatings. High temperature superconductors can be synthesized with sputtering under non-equilibrium conditions. Diamond films and ferroelectric materials are other applications. Booknews A concise but comprehensive overview of a technology currently being widely used in the microelectronics industry for the production of silicon integrated circuits. Recently interest has increased in cathodic sputtering since novel materials such as high temperature superconductors can be synthesized with sputtering under nonequilibrium thermal conditions. Annotation c. Book News, Inc., Portland, OR (booknews.com)
Thin Film Materials and Devices Thin Film Processes Sputtering Phenomena Sputtering Systems Deposition of Compound Thin Films Microfabrication by Sputtering Future Directions
\ From the Publisher"àcomprehensively covers state-of-the-art sputtering techniques and equipmentàthoroughly addresses all fundamental aspects." - Materials and Processing Report\ \ \ \ \ BooknewsA concise but comprehensive overview of a technology currently being widely used in the microelectronics industry for the production of silicon integrated circuits. Recently interest has increased in cathodic sputtering since novel materials such as high temperature superconductors can be synthesized with sputtering under nonequilibrium thermal conditions. Annotation c. Book News, Inc., Portland, OR (booknews.com)\ \
