High-Resolution X-Ray Scattering from Thin Films and Lateral Nanostructures
The book presents a detailed description of high-resolution x-ray scattering methods suitable for the investigation of the real structure of single-crystalline layers and multilayers, including structure defects in the layers and at the interfaces. Particular attention is devoted to lateral structures in semiconductors and semiconductor multilayers such as quantum wires and quantum dots. Both the theoretical background and the application of the methods are discussed. The second edition is...
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The book presents a detailed description of high-resolution x-ray scattering methods suitable for the investigation of the real structure of single-crystalline layers and multilayers, including structure defects in the layers and at the interfaces. Particular attention is devoted to lateral structures in semiconductors and semiconductor multilayers such as quantum wires and quantum dots. Both the theoretical background and the application of the methods are discussed. The second edition is extended to deal with lateral surface nanostructures such as gratings and dots, new examples for measuring layer thickness, lattice mismatch, and surface/interface roughness. The book will be an invaluable source for graduates and scientists.
1Elements for designing an X-ray diffraction experiment52Diffractometers and reflectometers313Scans and resolution in angular and reciprocal space434Basic principles635Kinematical theory756Dynamical theory977Semikinematical theory1238Determination of layer thicknesses of single layers and multilayers1439Lattice parameters and strains in epitaxial layers and multilayers17910Diffuse scattering from volume defects in thin layers20511X-ray scattering by rough multilayers23512X-ray scattering by artificially lateral semiconductor nanostructures27913Strain analysis in periodic nanostructures31714X-ray scattering from self-organized structures353
