Multicomponent and Multilayered Thin Films for Advanced Microtechnologies: Techniques, Fundamentals, and Devices
The synthesis of multicomponent/multilayered superconducting, conducting, semiconducting and insulating thin films has become the subject of an intensive, worldwide, interdisciplinary research effort. The development of deposition-characterization techniques and the science and technology related to the synthesis of these films are critical for the successful evolution of this interdisciplinary field of research and the implementation of the new materials in a whole new generation of advanced...
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The synthesis of multicomponent/multilayered superconducting, conducting, semiconducting and insulating thin films has become the subject of an intensive, worldwide, interdisciplinary research effort. The development of deposition-characterization techniques and the science and technology related to the synthesis of these films are critical for the successful evolution of this interdisciplinary field of research and the implementation of the new materials in a whole new generation of advanced microdevices. This book contains the lectures and contributed papers on various scientific and technological aspects of multicomponent and multilayered thin films presented at a NATO/ASI. Compared to other recent books on thin films, the distinctive character of this book is the interdisciplinary treatment of the various fields of research related to the different thin film materials mentioned above. The wide range of topics discussed in this book include vacuum-deposition techniques, synthesis-processing, characterization, and devices of multicomponent/multilayered oxide high temperature superconducting, ferroelectric, electro-optic, optical, metallic, silicide, and compound semiconductor thin films. The book presents an unusual intedisciplinary exchange of ideas between researchers with cross-disciplinary backgrounds and it will be useful to established investigators as well as postdoctoral and graduate students. Booknews The proceedings of the September-October 1992 NATO ASI comprise papers on topics including: fundamentals and technology related to high vacuum-based deposition techniques (plasma and ion beam sputtering, chemical and physical vapor deposition, molecular beam epitaxy and laser ablation-deposition) which present good prospects for a successful implementation into device fabrication; basic processes involved in the synthesis of multicomponent oxide high temperature superconducting, ferroelectric, electro-optic, and optical thin films; ion and electron beam-based characterization and electron microscopy analysis of multicomponent/multilayered metallic, silicide, and compound semiconductor materials; ion and electron beam-based characterization of metallic, silicide, and compound semiconductor materials; and high temperature superconducting, ferroelectric, electro-optic, and compound semiconductor advanced microdevices. Annotation c. Book News, Inc., Portland, OR (booknews.com)
\ BooknewsThe proceedings of the September-October 1992 NATO ASI comprise papers on topics including: fundamentals and technology related to high vacuum-based deposition techniques (plasma and ion beam sputtering, chemical and physical vapor deposition, molecular beam epitaxy and laser ablation-deposition) which present good prospects for a successful implementation into device fabrication; basic processes involved in the synthesis of multicomponent oxide high temperature superconducting, ferroelectric, electro-optic, and optical thin films; ion and electron beam-based characterization and electron microscopy analysis of multicomponent/multilayered metallic, silicide, and compound semiconductor materials; ion and electron beam-based characterization of metallic, silicide, and compound semiconductor materials; and high temperature superconducting, ferroelectric, electro-optic, and compound semiconductor advanced microdevices. Annotation c. Book News, Inc., Portland, OR (booknews.com)\ \
