Nanoindentation

Hardcover
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Author: Anthony C. Fischer-Cripps

ISBN-10: 0387220453

ISBN-13: 9780387220451

Category: Electronics - Microelectronics

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As the focus in materials science shifts towards designing materials at the sub-micron scale - the "nanotechnology" revolution - it becomes increasingly important to characterize the mechanical properties of thin films and small volumes of material. The development of of nanoscale probes and ultrasensitive transducers for force and depth has made such measurements possible."Nanoindentation" testing is becoming increasingly used in a wide variety of research and manufacturing areas, ranging from the testing of silicon wafers in the electronics industry to the characterization of hard coatings and other surface treatments for cutting tools, dental restoratives and other biomedical implants, and optical components.This book presents a comprehensive and detailed overview of the field of nanoindentation. The underlying theory behind the extraction of elastic modulus, hardness and other properties from the load-displacement data is discussed along with the various systematic and materials-related corrections involved. Also covered are the various methods of testing, details of an international standard for depth-sensing indentation testing, the significance of surface forces and adhesion details of commercially available instruments, and sample applications of the technique.Self-contained, the treatment is aimed at those entering the field, but by bringing together material scattered widely throughout the research literature the book will also be a useful reference for the more experienced researcher.

1Contact mechanics12Nanoindentation testing213Analysis of nanoindentation test data394Factors affecting nanoindentation test data695Simulation of nanoindentation test data946Scaling relationships in nanoindentation1057Time-dependent nanoindentation1118Nanoindentation of thin films1329Other techniques in nanoindenation14410Nanoindentation test standards15911Nanoindentation test instruments17812Applications of nanoindentation testing195App. 1Elastic indentation stress fields213App. 2Surface forces, adhesion and friction218App. 3Common indenter geometries231App. 4Non-linear least squares fitting235App. 5Properties of materials239App. 6Frequently asked questions241App. 7Specifications for a nanoindenter254