Optical Microscanners and Microspectrometers Using Thermal Bimorph Actuators
Optical Microscanners and Microspectrometers using Thermal Bimorph Actuators shows how to design and fabricate optical microsystems using innovative technologies and and original architectures. A barcode scanner, laser projection mirror and a microspectrometer are explained in detail, starting from the system conception, discussing simulations, choice of cleanroom technologies, design, fabrication, device test, packaging all the way to the system assembly.\ An advanced microscanning device...
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Optical Microscanners and Microspectrometers using Thermal Bimorph Actuators shows how to design and fabricate optical microsystems using innovative technologies and and original architectures. A barcode scanner, laser projection mirror and a microspectrometer are explained in detail, starting from the system conception, discussing simulations, choice of cleanroom technologies, design, fabrication, device test, packaging all the way to the system assembly.An advanced microscanning device capable of one- and two-dimensional scanning can be integrated in a compact barcode scanning system composed of a laser diode and adapted optics. The original design of the microscanner combines efficiently the miniaturized thermal mechanical actuator and the reflecting mirror, providing a one-dimensional scanning or an unique combination of two movements, depending on the geometry. The simplicity of the device makes it a competitive component.The authors rethink the design of a miniaturized optical device and find a compact solution for a microspectrometer, based on a tunable filter and a single pixel detector. A porous silicon technology combines efficiently the optical filter function with a thermal mechanical actuator on chip. The methodology for design and process calibration are discussed in detail. The device is the core component of an infrared gas spectrometer. Booknews Based on research performed at the Swiss Federal Institute of Technology, this book explores the application of MEMS technology in micro-optical devices that use integrated microactuators for scanning mirrors and optical interference plates. The authors develop thin film chromium and nickel actuators that are based on multimorph beams heated by resistive heating, and present several design and technologies for the realization of scanning micromirrors. The microscanner concept is further realized by optical interference filters made of porous silicon multilayers. Annotation c. Book News, Inc., Portland, OR
Preface1Introduction11.1Motivation11.2MEMS21.3MOEMS31.4MOEMS actuation principles162Basics for a thermally actuated micromirror272.1Microactuator specifications272.2Principle of the presented microscanner282.3The thermal bimorph actuator282.4Static temperature distribution in the microscanner462.5Response time of the bimorph beam592.6General conclusions643Microscanner technology673.1Fabrication process673.2Process improvements703.3Conclusions764One-dimensional microscanner774.1Test Set-up774.2Static characterization of Chromium based actuators784.3Static characterization of Nickel based actuators864.4Dynamic characterization884.5ID scanner applications1054.6Conclusions1115Two-dimensional microscanner1135.1Principle1135.2Design and modelling of the raster natural frequency1135.3Dynamic measurements1205.4Microprojector application1235.5Conclusions1336Advanced Optical Filters of Porous Silicon1356.1Principle1356.2History of porous silicon1366.3Fabrication of porous silicon1366.4Parameters determining the structure of porous silicon1396.5Electropolishing1446.6Porous silicon as sacrificial layer1456.7Calculation of optical interference filters1456.8Fabrication of optical filter of porous silicon1536.9Summary1637Micromachining using porous Silicon1657.1Goals for the technology1657.2Metal masks1667.3Nitride masks1677.4Free-standing porous silicon films1677.5Mask removal1697.6Thermal actuator design1697.7Mechanical filter plate suspension1817.8Homogeneity of the optical filter1847.9Process flow1907.10Summary1938Tunable Optical Filter and IR Gas Spectroscopy1958.1Overview of devices1958.2Optical characterization1988.3Chip separation and packaging2028.4System integration for gas sensing2058.5Summary2109Conclusions and outlook2119.1Conclusions2119.2Outlook215Appendices217A.1Complement to the curvature calculation due to residual stress217A.2Complement to the static temperature distribution calculation221A.3Large deflections225References229Symbols and Abbreviations255Glossary of terms263Acknowledgments267
\ Based on research performed at the Swiss Federal Institute of Technology, this book explores the application of MEMS technology in micro-optical devices that use integrated microactuators for scanning mirrors and optical interference plates. The authors develop thin film chromium and nickel actuators that are based on multimorph beams heated by resistive heating, and present several design and technologies for the realization of scanning micromirrors. The microscanner concept is further realized by optical interference filters made of porous silicon multilayers. Annotation c. Book News, Inc., Portland, OR\ \
