Science And Technology Of Electroceramic Thin Films
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Electroceramic thin films hold out the promise of applications in entirely new generations of advanced microdevices that may revolutionise technology, creating multibillion dollar markets in the process. Less glamorous than the high-temperature superconductors, but probably just as important, are electrically conductive, ferroelectric, piezoelectric, pyroelectric, electro-optic, and magnetic films. The list of potential applications of films having these properties is virtually endless, but there are still some issues to be resolved before fully functioning devices reach the market. All these issues and more are discussed in Science and Technology of Electroceramic Thin Films, which provides one of the best, most up to date summaries of the field currently available.
PrefaceReport on the NATO/ARWAcknowledgmentsPulsed Laser Ablation-Deposition and Characterization of Ferroelectric Metal Oxide Heterostructures1Low Energy Ion Bombardment Induced Effects in Multi-Component Electroceramic Thin Films23Growth and Properties of [actual symbol not reproducible] and Pb(Zr,Ti)O[subscript 3] Thin Films by Pulsed Laser Deposition53Wavelength Dependence in Pulsed Laser Deposition of ZnO Thin Films67Organometallic Chemical Vapor Deposition of Lead Zirconate Titanate75Alkoxide Precursors for Ferroelectric Thin Films85Deposition of Undoped and Doped Pb (Mg,Nb)O[subscript 3] - PbTiO[subscript 3], [actual symbol not reproducible] Alkaline Earth Titanate and Layered Perovskite Thin Films on Pt and Conductive Oxide Electrodes by Spin - On Processing: Correlation of Growth and Electrical Properties99Relationships Between Ferroelectric [actual symbol not reproducible] Domain Formation and Electrical Properties of Chemically Prepared Pb(Zr,Ti)O[subscript 3] Thin Films117Characterization of Sol-Gel [actual symbol not reproducible] Thin Film Capacitors with Hybrid (Pt, RuO[subscript 2]) Electrodes133Organically Modified Sol-Gel Precursors for Ferroelectric Deposition by Spin Coating147Preparation and Properties of Calcium Modified Lead Titanate Thin Films157Microstructure of Lead Titanate-Based Thin Films167Stoichiometry and Phase Structure of Sol-Gel Derived PZT-Based Thin Films177Liquid Phase Epitaxy of [actual symbol not reproducible] on KTaO[subscript 3] Substrates187Pulse Switching Characterization of Ferroelectric Thin Films201Polarization, Conduction, and Breakdown in Non-Ferroelectric Perovskite Thin Films223Anomalous Logarithmic Dependencies in D.C. Breakdown of Ferroelectric Thin Films249The Shape of the Hysteresis Curve of Ferroelectric Single Crystals and Ceramics261Fast Transient Measurements on Electroceramic Thin Films269The Influence of Dopants on the Leakage Current in PZT Thin-Film Ferroelectric Capacitors279Photo-Induced Storage and Imprinting in (Pb,La)(Zr,Ti)O[subscript 3] Thin Films291Depletion, Depolarizing Effects and Switching in Ferroelectric Thin Films301Nonstoichiometry, Defects, and Charge Transport in PZT315X-Ray Diffraction Line Profile Analysis of ZnO Thin Films Deposited on Al-SiO[subscript 2]-Si Substrates327Electron Emission from Ferroelectrics335Integration of Ferroelectric Thin Films for Memory Applications353Processing and Device Issues of High Permittivity Materials for Drams373Ferroelectric Thin Films for Capacitor and Sensor Applications383Piezoelectric and Ferroelectric Devices: Potential and Issues399Integrated Ferroelectric Microelectromechanical Systems413Fundamental Properties and Some Applications of Sol-Gel Ceramic Thin Films427SrTiO[subscript 3] Thin Films for Oxygen Sensors439Index455
