Thin Film Materials Technology: Sputtering of Compound Materials
An invaluable resource for industrial science and engineering newcomers to sputter deposition technology in thin film production applications, this book is rich in coverage of both historical developments and the newest experimental and technological information about ceramic thin films, a key technology for nano-materials in high-speed information applications and large-area functional coating such as automotive or decorative painting of plastic parts, among other topics. In seven concise...
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Wasa (Yokohama City U., Japan) notes that the sputtering phenomenon was first observed some 150 years ago. He and colleagues with the Matsushita Electrical Industrial Co., Kyoto, describe progress in sputtering technology in recent years and applications that are relevant to electronics (notably in the production of integrated circuits and magneto-optical recording media), and other common manufacturing processes (e.g. coating machine tools and reflective windows). Intended as a bridge between tutorial textbooks for graduate students and research guides, the volume includes experimental and production-level engineering data. Annotation © 2004 Book News, Inc., Portland, OR
1Thin film materials and devices12Thin film processes173Sputtering phenomena714Sputtering systems1155Deposition of compound thin films1916Structural control of compound thin films : perovskite and nanometer oxide thin films4057Microfabrication by sputtering465
