Thin Film Shape Memory Alloys: Fundamentals and Device Applications
This book, the first dedicated to this exciting and rapidly growing field, enables readers to understand and prepare high-quality, high-performance TiNi shape memory alloys (SMAs). It covers the properties, preparation and characterization of TiNi SMAs, with particular focus on the latest technologies and applications in MEMS and biological devices. Basic techniques and theory are covered to introduce new-comers to the subject, whilst various sub-topics, such as film deposition,...
Search in google:
This book, the first dedicated to this exciting and rapidly growing field, enables readers to understand and prepare high-quality, high-performance TiNi shape memory alloys (SMAs). It covers the properties, preparation and characterization of TiNi SMAs, with particular focus on the latest technologies and applications in MEMS and biological devices. Basic techniques and theory are covered to introduce new-comers to the subject, whilst various sub-topics, such as film deposition, characterization, post treatment, and applying thin films to practical situations, appeal to more informed readers. Each chapter is written by expert authors, providing an overview of each topic and summarizing all the latest developments, making this an ideal reference for practitioners and researchers alike.
1 Overview of sputter-deposited TiNi based thin films 12 Martensitic transformation in TiNi alloys 733 Deposition technique for TiNi thin film 884 TiNi multilayer thin films 1105 Crystallization and microstructural development 1246 Mechanical properties of TiNi thin films 1457 Stress and surface morphology evolution 1668 Ion implantation processing and associated irradiation effects 1939 Laser post-annealing and theory 22610 Overview of thin film shape memory alloy applications 26111 Theory of SMA thin films for microactuators and micropumps 27512 Binary and ternary alloy film diaphragm microactuators 30013 TiNi thin film devices 32114 Shape memory microvalves 34615 Superelastic thin films and applications for medical devices 37016 Fabrication and characterization of sputter-deposited TiNi superelastic microtubes 38517 Thin film shape memory microcage for biological applications 40318 Shape memory thin film composite microactuators 42619 TiNi thin film shape memory alloys for optical sensing applications 437Index 457
