Dry Etching For Vlsi
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\ BooknewsBased on the manual for an annual course given by the Phillips Research Laboratories in The Netherlands, reviews all aspects of etching with gas plasmas for VLSI in silicon semiconductor processing. At a level suitable for seniors and graduate students, discusses the fundamentals, systems, processes, tools, and applications. Includes 50 pages of abstracts of selected works cited in the extensive bibliography. Acidic paper. Annotation c. Book News, Inc., Portland, OR (booknews.com)\ \
