Principles of Lithography, Second Edition
This introduction to the science of microlithography focuses on the tools used to manufacture integrated circuits. It covers in-depth overlay, stages of exposure tools, and light sources. It also contains references for students who want to investigate other topics in more detail. This second edition includes new material on optical proximity corrections, next-generation lithography and other recent developments in the field. Additional problems have been added to each chapter. Annotation...
