Sub-Half-Micron Lithography for ULSIs
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Describes advanced techniques under development that represent the key to future semiconductor-device fabrication.
List of contributorsPrefaceAcknowledgementsList of principal abbreviations1Introduction12Optical lithography103X-ray lithography664Electron-beam lithography1075Ion-beam lithography1966Resists2137Metrology, defect inspection, and repair278Index321
